Systems configured to provide illumination of a specimen...

Details Systems configured to provide illumination of a specimen... Systems configured to provide illumination of a specimen...

2007-04-03

2007-04-03

Harrington, Alicia (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C359S730000, C356S237100

Reexamination Certificate

active

11145829

ABSTRACT:
Systems configured to provide illumination of a specimen during inspection are provided. One system includes catoptric elements configured to direct light from a light source to a line across the specimen at an oblique angle of incidence. The catoptric elements include positive and negative elements configured such that pupil distortions of the positive and negative elements are substantially canceled. Another system includes a dioptric element and a catoptric element. The dioptric element and the catoptric element are configured to direct light from a light source to a line across the specimen at an oblique angle of incidence. The dioptric and catoptric elements are also configured such that pupil distortions of the dioptric and catoptric elements are substantially canceled.

REFERENCES:
patent: 2002/0015142 (2002-02-01), Suzuki et al.
patent: 2004/0095573 (2004-05-01), Tsai et al.
patent: 2005/0088630 (2005-04-01), Sasaki

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