Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-04-12
2011-04-12
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S520000
Reexamination Certificate
active
07924434
ABSTRACT:
Systems configured to generate output corresponding to defects on a specimen and systems configured to generate phase information about defects on a specimen are provided. One system includes an optical subsystem that is configured to create interference between a test beam and a reference beam. The test beam and the reference beam are reflected from the specimen. The system also includes a detector that is configured to generate output representative of the interference between the test and reference beams. The interference increases contrast between the output corresponding to the defects and output corresponding to non-defective portions of the specimen.
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Fu Tao-Yi
Hwang Shiow-Hwei
Liu Xiumei
Chowdhury Tarifur
Cook Jonathon D
KLA-Tencor Technologies Corp.
Mewherter Ann Marie
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