Coherent light generators – Particular pumping means – Electrical
Reexamination Certificate
2006-07-18
2006-07-18
Harvey, Minsun Oh (Department: 2828)
Coherent light generators
Particular pumping means
Electrical
Reexamination Certificate
active
07079565
ABSTRACT:
Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduce the effective area over which arcing can occur, and can reduce the likelihood of arcing by improving the flow of gas between the electrodes, such as by allowing for design flexibility and reducing the necessary height of a nose portion used to control the discharge area of the electrode. An improved blower design, which can utilize improved bearings and a dry film lubricant, can help to circulate the laser gas between the electrode structures, such as at a speed of at least 30 m/s in order to operate the laser at repetition rates of 4 kHz or higher.
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Aab Konstantin
Baumler Juergen
Berger Vadim
Bragin Igor
Melnikov Oleg
Lambda Physik AG
Roy Tod T. Van
Stallman & Pollock LLP
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