Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2008-01-08
2008-01-08
Epps, Georgia (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C359S204200, C359S345000
Reexamination Certificate
active
07317179
ABSTRACT:
Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective elongated image in a plane for each lens in the lens array. In addition, the system may include a beam stop having an edge that is positioned in the plane, and a moveable mount rotating a lens of the lens array to vary an alignment between one of the elongated images and the beam stop edge.
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Akins Robert P.
Sandstrom Richard L.
Cymer Inc.
Epps Georgia
Hillman Matthew
Ko Tony
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