Active solid-state devices (e.g. – transistors – solid-state diode – Miscellaneous
Reexamination Certificate
2005-04-12
2005-04-12
Pham, Long (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Miscellaneous
C257S301000, C257S762000
Reexamination Certificate
active
06879051
ABSTRACT:
One aspect of the present invention relates to a method to facilitate formation of seed layer portions on sidewall surfaces of a trench formed in a substrate. The method involves the steps of forming a conformal seed layer over a barrier layer disposed conformal to a trench, wherein the trench is formed in the substrate; reflecting a light beam of x-ray radiation at the seed layer sidewall portions; generating a measurement signal based on the reflected portion of the light beam; and determining a thickness of the sidewall portions based on the measurement signal while the sidewall portions are being formed over the trench.
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Rangarajan Bharath
Singh Bhanwar
Subramanian Ramkumar
Templeton Michael K.
Advanced Micro Devices , Inc.
Amin & Turocy LLP
Pham Long
Trinh (Vikki) Hoa B.
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