Systems and methods for tilt and range measurement

Details Systems and methods for tilt and range measurement Systems and methods for tilt and range measurement

2005-07-07

2008-10-07

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07433052

ABSTRACT:
A method of determining an amount of tilt may include projecting at least two coherent wavefronts toward a target surface, the wavefronts reflecting from the target surface to create an interference fringe pattern on a detector, and transmitting a beam toward the target surface, the transmitted beam reflecting from the target surface to form a beam spot on the detector. A fringe pitch indicative of a distance to the target surface may be determined based on the interference fringe pattern. A displacement on the detector of the beam spot, relative to a nominal location of the beam spot when the target surface is at a nominal angle of incidence relative to the beam, may be determined. The amount of tilt of the target surface relative to the nominal angle of incidence, may be determined based on the displacement of the beam spot and the determined fringe pitch.

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