Systems and methods for single integrated substrate cleaning...

Details Systems and methods for single integrated substrate cleaning... Systems and methods for single integrated substrate cleaning...

2005-03-29

2010-06-08

Cleveland, Michael (Department: 1792)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

Reexamination Certificate

active

07731800

ABSTRACT:
Inventive methods and systems of cleaning patterned integrated circuit (“IC”) substrates are described. The cleaning methods of the present invention include: (1) providing the patterned integrated circuit substrate having thereon poly silicon lines adjacent to each other; (2) charging a solution, which contains at least a solute selected to promote cleaning of the patterned integrated circuit substrate, to produce a charged solution, wherein at least a portion of the solute is present as clusters in the charged solution; and (3) conveying the charged solution for cleaning the patterned integrated circuit substrate.

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