Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent
1987-07-06
1988-08-30
Ro, Bentsu
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
307308, 324457, 357 85, G01R 2912, H04R 1900
Patent
active
047679735
ABSTRACT:
Sensor systems and methods for detecting the position and/or movement of an object in multiple degrees of freedom. The sensor system of the present invention comprises at least one field-effect transistor (FET), the geometrical configuration of the FET being selected so as to provide the desired sensitivity. The FET is preferably provided with a conductive gate adjacent to but insulated from the channel region of the FET. An object whose position and/or movement is to be detected is prepared such that an electric field emanates from the object.
The FET is brought into the vicinity of the object, and the electric field emanating from the object interacts with the gate and/or channel region of the FET so as to modify the magnitude of the electrical current flowing through the channel region. The current through the channel region is detected and is used to obtain information about the position and movement of the object relative to the channel region of the FET. By positioning a plurality of substantially coplanar FETs in the vicinity of the object, the position and/or movement of the object in any desired number of degrees of freedom can be detected and monitored.
REFERENCES:
patent: 3016752 (1962-01-01), Huebschmann
patent: 3287506 (1966-11-01), Hahnlein
patent: 3294988 (1966-12-01), Packard
patent: 3351786 (1967-11-01), Muller et al.
patent: 3426424 (1969-02-01), Touchy
patent: 3436492 (1969-04-01), Reedyk
patent: 3569747 (1971-03-01), Siegel
patent: 3585415 (1971-06-01), Muller
patent: 3585466 (1971-06-01), Davis et al.
patent: 3612778 (1971-10-01), Murphy
patent: 3775572 (1973-11-01), Ishibashi
patent: 3812575 (1974-05-01), Hedman
patent: 3818426 (1974-06-01), Bonnet et al.
patent: 3835264 (1974-09-01), Overby
patent: 3875433 (1975-04-01), Uchikawa
patent: 3935481 (1976-01-01), Uchikawa
patent: 3946422 (1976-03-01), Yagi et al.
patent: 3973146 (1976-08-01), Arnold et al.
patent: 3978508 (1976-08-01), Vilkomerson
patent: 4035822 (1977-07-01), Vilkomerson
patent: 4035823 (1977-07-01), Marshall
patent: 4047214 (1977-09-01), Francombe
patent: 4104921 (1978-08-01), Nissl
patent: 4331840 (1982-05-01), Murphy et al.
patent: 4378510 (1983-03-01), Bennett
patent: 4390800 (1983-06-01), Tanaka et al.
patent: 4441038 (1984-04-01), Tanaka et al.
patent: 4443666 (1984-04-01), Cote
patent: 4447678 (1984-05-01), Fidi
patent: 4527218 (1985-07-01), von Seggern
patent: 4582961 (1986-04-01), Frederiksen
patent: 4716371 (1987-12-01), Blitshteyn et al.
Nathanson et al., "The Rosonant Gate Transistor," IEEE Trans. on Electron Devices, ED-14(3):117-133 (Mar. 1967).
Vosburgh et al., "Solid State Surface Charge Sensor," Rev. Sci. Instrum., 47(8):972 (May 1976).
Middlehoek et al., "Silicon Micro-Transducers," Phys. E: Sci. Instrum., 14:1343-1352 (1981).
Horenstein, "Field-Effect Transistor Tracking Surface Field Sensor," Rev. Sci. Instrum., 55(2):222-225 (Oct. 1983).
Bergveld, "The Impact of MOSFET-Based Sensors," Sensors and Actuators, 8:109-127 (1985).
Voorthutzen et al., "Theoretical Consideration in the Design of Integrated Semiconductor Sensors Applying Electrets," IEEE Trans. Electron Devices, ED-32(7):1185-1190 (Jul. 1985).
Jacobsen Stephen C.
Phillips Richard P.
Wood John E.
Ro Bentsu
Sarcos Incorporated
LandOfFree
Systems and methods for sensing position and movement does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Systems and methods for sensing position and movement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Systems and methods for sensing position and movement will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2090396