Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2007-03-19
2010-12-21
Morgan, Eileen P. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S011000, C451S065000, C451S287000
Reexamination Certificate
active
07854644
ABSTRACT:
Systems and methods for removing microfeature workpiece surface defects are disclosed. A method for processing a microfeature workpiece in accordance with one embodiment includes removing surface defects from a surface of a microfeature workpiece by engaging the surface with a buffing medium having a first hardness, and moving at least one of the workpiece and the buffing medium relative to the other. After removing the surface defects and before adding additional material to the microfeature workpiece the method can further include engaging the microfeature workpiece with a polishing pad having a second hardness greater than the first hardness. Additional material can be removed from the microfeature workpiece by moving at least one of the microfeature workpiece and the polishing pad relative to the other.
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Bastian Joseph A.
Reukauf Jeremey T.
Micro)n Technology, Inc.
Morgan Eileen P.
Perkins Coie LLP
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