Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2007-09-04
2007-09-04
Ackun, Jr., Jacob K. (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S054000, C451S059000
Reexamination Certificate
active
11181341
ABSTRACT:
Systems and methods for removing microfeature workpiece surface defects are disclosed. A method for processing a microfeature workpiece in accordance with one embodiment includes removing surface defects from a surface of a microfeature workpiece by engaging the surface with a buffing medium having a first hardness, and moving at least one of the workpiece and the buffing medium relative to the other. After removing the surface defects and before adding additional material to the microfeature workpiece the method can further include engaging the microfeature workpiece with a polishing pad having a second hardness greater than the first hardness. Additional material can be removed from the microfeature workpiece by moving at least one of the microfeature workpiece and the polishing pad relative to the other.
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Kondos, S. et al., “Abrasive-Free Polishing for Copper Damascene Interconnection,” Journal
Bastian Joseph A.
Reukauf Jeremey T.
Ackun Jr. Jacob K.
Micro)n Technology, Inc.
Perkins Coie LLP
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