Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-03-27
2007-03-27
Vanore, David (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C378S119000, C372S005000, C372S082000
Reexamination Certificate
active
11174442
ABSTRACT:
Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a temperature sufficient to remove deposited debris from the mirror. In another aspect, a device is disclosed for removing plasma generated debris from an EUV light source collector mirror having a different debris deposition rate at different zones on the collector mirror. In a particular aspect, an EUV collector mirror system may comprise a source of hydrogen to combine with Li debris to create LiH on a collector surface; and a sputtering system to sputter LiH from the collector surface. In another aspect, an apparatus for etching debris from a surface of a EUV light source collector mirror with a controlled plasma etch rate is disclosed.
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Ershov Alexander I.
Marx William F.
Cray William C.
Cymer Inc.
Hillman Matthew
Vanore David
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