Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-07-12
2005-07-12
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S614000, C356S624000
Reexamination Certificate
active
06917421
ABSTRACT:
Systems and methods for assessing a dimension of a feature on a specimen are provided. A system may include an illumination system configured to scan the specimen with light at multiple focal planes substantially simultaneously. The system may also include a collection system that may include multiple collectors. Approximately all light returned from one of the multiple focal planes may be collected by one of the multiple collectors. In addition, the system may include a processor configured to determine a relative intensity of the collected light. The processor may also be configured to assess a dimension of the feature on the specimen in a direction substantially perpendicular to an upper surface of the specimen using the relative intensity.
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SISCAN™ Optical 3D-Inspection, © by Siemens Dematic AG, 2001, 2 pages.
Hiebert Stephen
Schmidley Richard
Wihl Tim
Daffer McDaniel LLP
KLA-Tencor Technologies Corp.
Mewherter Ann Marie
Pham Hoa Q.
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