Systems and methods for minimizing scattered light in...

Details Systems and methods for minimizing scattered light in... Systems and methods for minimizing scattered light in...

2009-07-09

2010-12-28

Stultz, Jessica T (Department: 2873)

Optical: systems and elements

Optical modulator

C359S738000, C359S259000, C359S290000, C430S326000

Reexamination Certificate

active

07859735

ABSTRACT:
A lithography method is provided. The method includes generating a beam of radiation, patterning portions of the beam of radiation, projecting the patterned beam of radiation towards a substrate, and blocking scattered light from the beam of radiation from the substrate.

REFERENCES:
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6191880 (2001-02-01), Schuster
patent: 6448999 (2002-09-01), Utterback et al.
patent: 6617572 (2003-09-01), Ishizuka
patent: 6687041 (2004-02-01), Sandstrom
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 7006295 (2006-02-01), Coston et al.
patent: 7023525 (2006-04-01), Bleeker et al.
patent: 7184610 (2007-02-01), Weinstein et al.
patent: 7567368 (2009-07-01), Cebuhar et al.
patent: 2001/0046631 (2001-11-01), Fujiwara et al.
patent: 2003/0218731 (2003-11-01), Tomita
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0130561 (2004-07-01), Jain
patent: 2004/0246559 (2004-12-01), Tamada et al.
patent: 2005/0007572 (2005-01-01), George et al.
patent: 2005/0237508 (2005-10-01), Eib et al.
patent: 53-29277 (1978-03-01), None
patent: 57-188824 (1982-11-01), None
patent: 9-184918 (1997-07-01), None
patent: 2000-206703 (2000-07-01), None
patent: 2004-062156 (2004-02-01), None
patent: 2004-343003 (2004-12-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 98/38597 (1998-09-01), None
Translation of Notification of Reason for Refusal for Japanese Patent Application No. 2006-001391 mailed Nov. 25, 2008, 2 pgs.
Notification of Reasons for Refusal for Japanese Patent Application No. 2006-001391 mailed Dec. 24, 2008, 3 pgs.
Notification of Reasons for Refusal for Patent Application No. 2006-001391 mailed Jul. 28, 2009, 2 pgs.
Non-Final Rejection mailed May 2, 2007 for U.S. Appl. No. 11/029,724, 10 pgs.
Final Rejection mailed Feb. 11, 2008 for U.S. Appl. No. 11/029,724, 10 pgs.
Second Non-Final Rejection mailed Feb. 12, 2009 for U.S. Appl. No. 11/029,724, 10 pgs.
Notice of Allowance mailed May 21, 2009 for U.S. Appl. No. 11/029,724, 7 pgs.

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