Systems and methods for metrology recipe and model generation

Details Systems and methods for metrology recipe and model generation Systems and methods for metrology recipe and model generation

2006-08-08

2006-08-08

Cabrera, Zoila (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S109000

Reexamination Certificate

active

07089075

ABSTRACT:
Systems and methodologies are disclosed for generating setup information for use measuring process parameters associated with semiconductor devices. A system comprises an off-line measurement instrument to measure an unpatterned wafer and a setup information generator to generate setup information according to the unpatterned wafer measurement. The system then provides the setup information to a process measurement system for use in measuring production wafers in a semiconductor manufacturing process.

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