Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate
2008-05-06
2008-05-06
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
Having wavefront division
C356S600000, C382S149000, C250S23700G
Reexamination Certificate
active
07369253
ABSTRACT:
Measurement of sample surface flatness of a continuously moving sample. A conveyor continuously conveys a sample beneath a grating disposed at a non-zero angle with respect to the plane of conveyance. The relative distance between the sample and the angled grating changes with the horizontal translation of the sample. A camera disposed above the sample and the grating captures, at constant time intervals, a sequence of images, each image comprising a shadow moiré fringe pattern that is indicative of the sample's surface flatness. The continuous change in relative distance between the sample and the grating introduces a known or unknown phase step between the shadow moiré fringe patterns of each successive image. A computer associated with the camera processes the images to determine phase values of pixels at, and the relative height of the sample surface at, selected pixel locations of the sample.
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McCarron Sean Patrick
Pan Jiahui
Petriccione Gregory James
Zwemer Dirk Adrian
AkroMetrix, LLC
Connolly Patrick
King & Spalding LLP
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