Optics: measuring and testing – Dimension
Reexamination Certificate
2006-03-29
2008-12-09
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Dimension
C356S601000, C356S445000, C356S364000, C356S369000
Reexamination Certificate
active
07463369
ABSTRACT:
Systems and methods for measuring one or more characteristics of patterned features on a specimen are provided. One system includes an optical subsystem configured to acquire measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The system also includes a processor configured to determine the one or more characteristics of the patterned features from the measurements. One method includes acquiring measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The method also includes determining the one or more characteristics of the patterned features from the measurements.
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Gross Kenneth P.
Wack Dan
Wang Haiming
Baker & McKenzie LLP
KLA-Tencor Technologies Corp.
Nguyen Sang
LandOfFree
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