Optics: measuring and testing – Angle measuring or angular axial alignment – Automatic following or aligning while indicating measurement
Reexamination Certificate
2008-12-22
2010-10-26
Tarcza, Thomas H (Department: 3662)
Optics: measuring and testing
Angle measuring or angular axial alignment
Automatic following or aligning while indicating measurement
C356S139010, C356S139100
Reexamination Certificate
active
07821625
ABSTRACT:
Angular deviation of illumination beam is measured with high accuracy for an expanded continuous range of angles using grating sensors that are configured to exhibit Surface Plasmon Resonance effects at actinic wavelengths. The beam deviation measurement systems and procedures are applicable to both mask-based and maskless lithography tools. A control system adopts an appropriate calibration algorithm based on whether the SPR effect is detected or not. Relative intensity shift in an SPR-affected diffractive order, and/or relative position and slope change in non-SPR-affected diffractive orders are used as a basis of the adopted calibration algorithm.
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ASML Holding N.V.
Ratcliffe Luke D
Sterne, Kessler, Goldstein & Fox P.L.L.C
Tarcza Thomas H
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