Systems and methods for laser-assisted plasma processing

Details Systems and methods for laser-assisted plasma processing Systems and methods for laser-assisted plasma processing

2007-11-20

2007-11-20

Lee, K. Richard (Department: 2832)

Electric heating

Metal heating

By arc

C219S121360, C219S121470

Reexamination Certificate

active

10913739

ABSTRACT:
A controllable heat source, such as a laser or flame torch, can be used to pre-heat a portion of the surface of a workpiece, such as a glass optic or semiconductor wafer. Reactive atom plasma (RAP) processing can be used to modify the pre-heated surface portion, as the pre-heated material will more readily chemically combine with the atomic radicals of the precursor in the plasma. A RAP torch, such as an ICP plasma torch, MIP plasma torch, or flame torch, can be used to shape, polish, etch, planarize, deposit, chemically modify and/or redistribute material on the surface of the workpiece. The material modified by the torch can substantially correspond to the pattern or portion of the surface that was pre-heated by the heat source. This description is not intended to be a complete description of, or limit the scope of, the invention. Other features, aspects, and objects of the invention can be obtained from a review of the specification, the figures, and the claims.

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International Search Report Mailed Oct. 31, 2005.
Supplementary European Search Report, EPO, mailed Dec. 21, 2006, 4 pages.

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