Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate
2005-06-06
2010-06-01
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Reexamination Certificate
active
07728965
ABSTRACT:
Systems and methods for inspecting an edge of a specimen are provided. One system includes an illumination subsystem configured to direct light to the edge of the specimen at an oblique angle of incidence. The plane of incidence of the light is substantially perpendicular to a plane substantially tangent to the edge of the specimen. The system also includes a detection subsystem configured to collect light scattered from the edge and to generate signals responsive to the scattered light. One method includes directing light to the edge of the specimen at an oblique angle of incidence. The plane of incidence is substantially perpendicular to a plane substantially tangent to the edge of the specimen. The method also includes collecting light scattered from the edge and generating signals responsive to the scattered light. The signals described above can be used to detect defects on the edge of the specimen.
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Cui Steve Yifeng
Haller Kurt Lindsay
Lera Jared
Akanbi Isiaka O
Chowdhury Tarifur R.
KLA-Tencor Technologies Corp.
Mewherter Ann Marie
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