Systems and methods for implementing an interaction between...

Details Systems and methods for implementing an interaction between... Systems and methods for implementing an interaction between...

2007-10-02

2007-10-02

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

Position or displacement

Position transverse to viewing axis

C356S614000, C356S623000, C356S624000

Reexamination Certificate

active

11138175

ABSTRACT:
Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.

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