Systems and methods for immersion metrology

Details Systems and methods for immersion metrology Systems and methods for immersion metrology

2007-05-08

2007-05-08

Punnoose, Roy M. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C356S635000, C356S124000

Reexamination Certificate

active

10794094

ABSTRACT:
Fluid immersion technology can be utilized to increase the resolution and angular range of existing metrology systems. An immersion fluid placed between the metrology optics and the sample can reduce the refraction at the sample interface, thereby decreasing the spot size of the beam on a feature of the sample while simultaneously increasing the angular range of the system. The decreased spot size, in combination with an increased angular spread, allows an existing metrology system to measure parameters of a sample, such as a semiconductor or microelectronic device, with improved resolution and without expensive and/or complex changes to the mechanics of the metrology system.

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