Systems and methods for high-precision length measurement

Details Systems and methods for high-precision length measurement Systems and methods for high-precision length measurement

2006-08-30

2008-12-02

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S004090

Reexamination Certificate

active

07460242

ABSTRACT:
Provided are systems and methods for performing high-precision length measurement. One such system includes: an optical receiver, configure to receive a reflected optical pulse from a target; an optical combiner, configured to generate a combined optical pulse using the reflected optical pulse and a reference optical pulse; and a signal analyzer configured to determine a distance to the target using a depth of modulation value of the combined signal. A method as disclosed herein includes the steps of determining a first length component of a combined optical signal using a depth of modulation value and determining a second length component of the combined optical signal using a modulation period value.

REFERENCES:
patent: 6252655 (2001-06-01), Tanaka
patent: 7023556 (2006-04-01), Dorrer

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