Optical: systems and elements – Single channel simultaneously to or from plural channels
Reexamination Certificate
2005-10-28
2008-12-30
Sugarman, Scott J (Department: 2873)
Optical: systems and elements
Single channel simultaneously to or from plural channels
C359S233000
Reexamination Certificate
active
07471455
ABSTRACT:
Systems and methods are disclosed for shaping a laser beam for interaction with a film in which the laser beam travels along a beam path and defines a short-axis and a long-axis. In one aspect, the system may include a first short-axis element having an edge positioned at a distance, d1, along the beam path from the film and a second short-axis element having an edge positioned at a distance, d2, along the beam path from the film, with d2<d1. An optic may be positioned along the beam path between the second element and the film for focusing the beam in the short-axis for interaction with the film. In another aspect, a system may be provided having a mechanism operative to selectively adjust the curvature of one or both of the edges of the short-axis element.
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Cefalo Albert P.
Das Palash P.
Knowles David S.
Muenz Holger
Shklover Vitaliy
Cymer Inc.
Hillman Matthew K.
Patel Vipin M
Sugarman Scott J
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