Systems and methods for determining a position of a support

Details Systems and methods for determining a position of a support Systems and methods for determining a position of a support

2006-01-20

2010-11-16

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C378S195000

Reexamination Certificate

active

07835011

ABSTRACT:
A method for determining a change in a position of a support is described. The method includes determining the change in the position of the support used in an imaging system, where determining the change includes computing the position by operating a photodetector configured to detect laser energy that provides information regarding the position.

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Optics, Fourth Edition by Eugene Hect, published by Addison Wesley 2002.

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