Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-05-15
2007-05-15
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S505100, C134S001100
Reexamination Certificate
active
11148021
ABSTRACT:
A system is disclosed for protecting an internal EUV light source component from ions generated at a plasma formation site. In one aspect, the system may comprise a plurality of foil plates and an arrangement for generating a magnetic field to deflect ions into one of the foil plate surfaces. In another aspect, an electrostatic grid may be positioned for interaction with ions to reduce ion energy, and a magnetic field may be used to deflect the reduced energy ions onto paths wherein the ions do not strike the internal component. In yet another aspect, a grid may be connected to a circuit tuned to a resonant frequency to reduce ion energy. For example, the resonant frequency may be substantially equal to an inverse of a time difference between the time when electrons reach the grid and a subsequent time when ions reach the grid.
REFERENCES:
patent: 2740963 (1956-04-01), Donovan et al.
patent: 2759106 (1956-08-01), Wolter
patent: 3150483 (1964-09-01), Mayfield et al.
patent: 3232046 (1966-02-01), Meyer
patent: 3279176 (1966-10-01), Boden
patent: 3746870 (1973-07-01), Demarest
patent: 3960473 (1976-06-01), Harris
patent: 3961197 (1976-06-01), Dawson
patent: 3969628 (1976-07-01), Roberts et al.
patent: 4009391 (1977-02-01), Janes et al.
patent: 4042848 (1977-08-01), Lee
patent: 4088966 (1978-05-01), Samis
patent: 4143275 (1979-03-01), Mallozzi et al.
patent: 4162160 (1979-07-01), Witter
patent: 4203393 (1980-05-01), Giardini
patent: 4223279 (1980-09-01), Bradford, Jr. et al.
patent: 4329664 (1982-05-01), Javan
patent: 4364342 (1982-12-01), Asik
patent: 4369758 (1983-01-01), Endo
patent: 4455658 (1984-06-01), Sutte et al.
patent: 4504964 (1985-03-01), Cartz et al.
patent: 4507588 (1985-03-01), Asmussen et al.
patent: 4534035 (1985-08-01), Long
patent: 4536884 (1985-08-01), Weiss et al.
patent: 4538291 (1985-08-01), Iwamatsu
patent: 4550408 (1985-10-01), Karning et al.
patent: 4561406 (1985-12-01), Ward
patent: 4596030 (1986-06-01), Herziger et al.
patent: 4618971 (1986-10-01), Weiss et al.
patent: 4626193 (1986-12-01), Gann
patent: 4633492 (1986-12-01), Weiss et al.
patent: 4635282 (1987-01-01), Okada et al.
patent: 4751723 (1988-06-01), Gupta et al.
patent: 4752946 (1988-06-01), Gupta et al.
patent: 4774914 (1988-10-01), Ward
patent: 4837794 (1989-06-01), Riordan et al.
patent: 4891820 (1990-01-01), Rando et al.
patent: 4928020 (1990-05-01), Birx et al.
patent: 4959840 (1990-09-01), Akins et al.
patent: 5005180 (1991-04-01), Edelman et al.
patent: 5022033 (1991-06-01), Hackell
patent: 5023884 (1991-06-01), Akins et al.
patent: 5023897 (1991-06-01), Neff et al.
patent: 5025445 (1991-06-01), Anderson et al.
patent: 5025446 (1991-06-01), Kuizenga
patent: 5027076 (1991-06-01), Horsley et al.
patent: 5070513 (1991-12-01), Letardi
patent: 5091778 (1992-02-01), Keeler
patent: 5102776 (1992-04-01), Hammer et al.
patent: 5126638 (1992-06-01), Dethlefsen
patent: 5142166 (1992-08-01), Birx
patent: 5142543 (1992-08-01), Wakabayashi et al.
patent: 5157684 (1992-10-01), Benda et al.
patent: 5175755 (1992-12-01), Kumakhov
patent: 5181135 (1993-01-01), Keeler
patent: 5189678 (1993-02-01), Ball et al.
patent: 5313481 (1994-05-01), Cook et al.
patent: 5315611 (1994-05-01), Ball et al.
patent: 5319695 (1994-06-01), Itoh et al.
patent: 5359620 (1994-10-01), Akins
patent: 5411224 (1995-05-01), Dearman et al.
patent: 5425922 (1995-06-01), Kawaguchi
patent: 5448580 (1995-09-01), Birx et al.
patent: 5450436 (1995-09-01), Mizoguchi et al.
patent: 5463650 (1995-10-01), Ito et al.
patent: 5471965 (1995-12-01), Kapich
patent: 5504795 (1996-04-01), McGeoch
patent: 5563555 (1996-10-01), Nalos et al.
patent: 5729562 (1998-03-01), Birx et al.
patent: 5763930 (1998-06-01), Partlo
patent: 5852621 (1998-12-01), Sandstrom
patent: 5856991 (1999-01-01), Ershov
patent: 5863017 (1999-01-01), Larson et al.
patent: 5866871 (1999-02-01), Birx
patent: 5933271 (1999-08-01), Waarts et al.
patent: 5936988 (1999-08-01), Partlo et al.
patent: 5953360 (1999-09-01), Vitruk et al.
patent: 5963616 (1999-10-01), Silfvast et al.
patent: 5978394 (1999-11-01), Newman et al.
patent: 5991324 (1999-11-01), Knowles et al.
patent: 6005879 (1999-12-01), Sandstrom et al.
patent: 6016323 (2000-01-01), Kafka et al.
patent: 6016325 (2000-01-01), Ness et al.
patent: 6018537 (2000-01-01), Hofmann et al.
patent: 6028880 (2000-02-01), Carlesi et al.
patent: 6031241 (2000-02-01), Silfvast et al.
patent: 6039850 (2000-03-01), Schulz
patent: 6051841 (2000-04-01), Partlo
patent: 6064072 (2000-05-01), Partlo et al.
patent: 6067306 (2000-05-01), Sandstrom et al.
patent: 6067311 (2000-05-01), Morton et al.
patent: 6094448 (2000-07-01), Fomenkov et al.
patent: 6104735 (2000-08-01), Webb
patent: 6128323 (2000-10-01), Myers et al.
patent: 6151346 (2000-11-01), Partlo et al.
patent: 6151349 (2000-11-01), Gong et al.
patent: 6164116 (2000-12-01), Rice et al.
patent: 6172324 (2001-01-01), Birx
patent: 6181719 (2001-01-01), Sukhman et al.
patent: 6192067 (2001-02-01), Toda et al.
patent: 6195272 (2001-02-01), Pascente
patent: 6208674 (2001-03-01), Webb et al.
patent: 6208675 (2001-03-01), Webb
patent: 6219368 (2001-04-01), Govorkov
patent: 6240117 (2001-05-01), Gong et al.
patent: 6281471 (2001-08-01), Smart
patent: 6285743 (2001-09-01), Kondo et al.
patent: 6307913 (2001-10-01), Foster et al.
patent: 6359922 (2002-03-01), Partlo et al.
patent: 6370174 (2002-04-01), Onkels et al.
patent: 6377651 (2002-04-01), Richardson et al.
patent: 6381257 (2002-04-01), Ershov et al.
patent: 6392743 (2002-05-01), Zambon et al.
patent: 6396900 (2002-05-01), Barbee, Jr. et al.
patent: 6404784 (2002-06-01), Komine
patent: 6414979 (2002-07-01), Ujazdowski et al.
patent: 6442181 (2002-08-01), Oliver et al.
patent: 6452199 (2002-09-01), Partlo et al.
patent: 6466602 (2002-10-01), Fleurov et al.
patent: 6477193 (2002-11-01), Oliver et al.
patent: 6493323 (2002-12-01), Dobrowolski et al.
patent: 6493374 (2002-12-01), Fomenkov et al.
patent: 6529531 (2003-03-01), Everage et al.
patent: 6532247 (2003-03-01), Spangler et al.
patent: 6535531 (2003-03-01), Smith et al.
patent: 6538737 (2003-03-01), Sandstrom et al.
patent: RE38054 (2003-04-01), Hofmann et al.
patent: 6541786 (2003-04-01), Partlo et al.
patent: 6549551 (2003-04-01), Ness et al.
patent: 6553049 (2003-04-01), Besaucele et al.
patent: 6566667 (2003-05-01), Partlo et al.
patent: 6566668 (2003-05-01), Rauch et al.
patent: 6567450 (2003-05-01), Myers et al.
patent: 6567499 (2003-05-01), McGeoch
patent: 6576912 (2003-06-01), Visser et al.
patent: 6584132 (2003-06-01), Morton
patent: 6586757 (2003-07-01), Melnychuk et al.
patent: 6621846 (2003-09-01), Sandstrom et al.
patent: 6625191 (2003-09-01), Knowles et al.
patent: 6635844 (2003-10-01), Yu
patent: 6671294 (2003-12-01), Kroyan et al.
patent: 6721340 (2004-04-01), Fomenkov et al.
patent: 6757316 (2004-06-01), Newman et al.
patent: 6765945 (2004-07-01), Sandstrom et al.
patent: 6782031 (2004-08-01), Hofmann et al.
patent: 6787788 (2004-09-01), Shell et al.
patent: 6795474 (2004-09-01), Partlo et al.
patent: 6972421 (2005-12-01), Melnychuk et al.
patent: 2001/0055364 (2001-12-01), Kandaka et al.
patent: 2002/0006149 (2002-01-01), Spangler et al.
patent: 2002/0009176 (2002-01-01), Ameniya et al.
patent: 2002/0012376 (2002-01-01), Das et al.
patent: 2002/0014598 (2002-02-01), Melnychuk et al.
patent: 2002/0014599 (2002-02-01), Rauch et al.
patent: 2002/0021728 (2002-02-01), Newman et al.
patent: 2002/0048288 (2002-04-01), Kroyan et al.
patent: 2002/0100882 (2002-08-01), Partlo et al.
patent: 2002/0101589 (2002-08-01), Sandstrom et al.
patent: 2002/0105994 (2002-08-01), Partlo et al.
patent: 2002/0114370 (2002-08-01), Onkels et al.
patent: 2002/0141536 (2002-10-01), Richardson
patent: 2002/0154668 (2002-10-01), Knowles et al.
patent: 2002/0162973 (2002-11-01), Cordingley et al.
patent: 2002/0163313 (2002-11-01), Ness et al.
patent: 2002/0168049 (2002-11-01), Schriever et al.
patent: 2003/0006383 (2003-01-01), Melynchuk et al.
patent: 2003/0068012 (2003-04-01), Ahmad et al.
patent: 2003/0219056 (2003-11-01), Yager et al.
patent: 2004/0047385 (2004-03-01), Knowles et al.
patent: 2005/0
Hoffman Jerzy R.
Rettig Curtis L.
Vargas Ernesto L.
Cymer Inc.
Hillman Matthew K.
Nguyen Kiet T.
LandOfFree
Systems and methods for deflecting plasma-generated ions to... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Systems and methods for deflecting plasma-generated ions to..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Systems and methods for deflecting plasma-generated ions to... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3768984