Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-08-29
2008-11-25
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S072000, C355S075000, C378S034000
Reexamination Certificate
active
07456928
ABSTRACT:
Systems and methods for controlling ambient pressure during processing of microfeature workpieces, including during immersion lithography, are disclosed. A system in accordance with one embodiment includes a support configured to carry a microfeature workpiece with a surface of the microfeature workpiece at a support location, and a liquid supply device positioned proximate to the support to dispense liquid at the surface location. The system can further include a generally gas-tight enclosure disposed around at least a portion of the surface location. The enclosure can be coupleable to a vacuum source and can be configured to withstand an internal pressure less than atmospheric pressure. This arrangement can be used in the context of an immersion photolithography system, or other systems for which a liquid is disposed on the surface of the microfeature workpiece.
REFERENCES:
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4968375 (1990-11-01), Sato et al.
patent: 5260174 (1993-11-01), Nakazawa et al.
patent: 5452053 (1995-09-01), Nozue et al.
patent: 5559582 (1996-09-01), Nishi et al.
patent: 5673208 (1997-09-01), Meier et al.
patent: 5698069 (1997-12-01), Aiyer et al.
patent: 5825470 (1998-10-01), Miyai et al.
patent: 5871584 (1999-02-01), Tateyama et al.
patent: 5931722 (1999-08-01), Ohmi et al.
patent: 6038015 (2000-03-01), Kawata
patent: 6063190 (2000-05-01), Hasebe et al.
patent: 6266132 (2001-07-01), Stewart et al.
patent: 6269517 (2001-08-01), Dornier et al.
patent: 6290863 (2001-09-01), Morgan et al.
patent: 6459473 (2002-10-01), Chang et al.
patent: 6466315 (2002-10-01), Karpol et al.
patent: 6496257 (2002-12-01), Taniguchi et al.
patent: 6529274 (2003-03-01), Hickman
patent: 6550990 (2003-04-01), Sakurai et al.
patent: 6563568 (2003-05-01), Pierrat
patent: 6624879 (2003-09-01), Imai et al.
patent: 6666927 (2003-12-01), Gindel
patent: 6682406 (2004-01-01), Chiou et al.
patent: 6809794 (2004-10-01), Sewell
patent: 6817057 (2004-11-01), Shirley et al.
patent: 6862080 (2005-03-01), Matsui et al.
patent: 6867844 (2005-03-01), Vogel et al.
patent: 6970228 (2005-11-01), Aoki et al.
patent: 2003/0200996 (2003-10-01), Hiatt et al.
patent: 2004/0118184 (2004-06-01), Violette
patent: 2004/0134420 (2004-07-01), Lei
patent: 2004/0154530 (2004-08-01), Hiatt et al.
patent: 2004/0169924 (2004-09-01), Flagello et al.
patent: 2004/0207824 (2004-10-01), Lof et al.
patent: 2004/0211920 (2004-10-01), Maria Derksen et al.
patent: 2004/0263808 (2004-12-01), Sewell
patent: 2005/0024609 (2005-02-01), De Smit et al.
patent: 2005/0028314 (2005-02-01), Hickman et al.
patent: 2005/0042554 (2005-02-01), Dierichs et al.
patent: 2005/0048220 (2005-03-01), Mertens et al.
patent: 2005/0078287 (2005-04-01), Sengers et al.
patent: 2005/0259234 (2005-11-01), Hirukawa et al.
patent: 2005/0264802 (2005-12-01), Shibata et al.
patent: 2006/0023185 (2006-02-01), Hazelton et al.
patent: 2006/0250588 (2006-11-01), Brandi
patent: 2007/0242242 (2007-10-01), Nagasaka et al.
patent: 2007/0268470 (2007-11-01), Shibazaki
patent: 0268284 (1988-05-01), None
patent: 0 605 103 (1994-07-01), None
patent: 1489462 (2004-12-01), None
patent: 1498778 (2005-01-01), None
patent: 1 582 924 (2005-10-01), None
patent: 1681597 (2006-07-01), None
patent: 1739492 (2007-01-01), None
patent: 62122132 (1987-06-01), None
patent: 63-157419 (1988-06-01), None
patent: 1-171762 (1989-07-01), None
patent: 1-283930 (1989-11-01), None
patent: 5-291400 (1993-11-01), None
patent: 7-302827 (1995-11-01), None
patent: 10-223740 (1998-08-01), None
patent: 10-294261 (1998-11-01), None
patent: 2000-150627 (2000-05-01), None
patent: 1 612 850 (2006-01-01), None
patent: 573040 (2007-01-01), None
patent: 2003056808 (2003-07-01), None
patent: WO-2004/090956 (2004-10-01), None
U.S. Appl. No. 11/189,236, filed Jul. 25, 2005, Benson.
U.S. Appl. No. 11/335,251, filed Jan. 18, 2006, Manning.
U.S. Appl. No. 11/432,153, filed May 10, 2006, Hickman.
U.S. Appl. No. 11/432,160, filed May 10, 2006, Hickman.
Chang, K., “When There is Splish, but No Splash,” 1 page, New York Times, Apr. 5, 2005.
International Search Report and Written Opinion for International Application No. PCT/US2006/028044, Mar. 19, 2007, 15 pages.
Micro)n Technology, Inc.
Perkins Coie LLP
Rutledge D.
LandOfFree
Systems and methods for controlling ambient pressure during... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Systems and methods for controlling ambient pressure during..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Systems and methods for controlling ambient pressure during... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4045374