Systems and methods for charging a cleaning solution used...

Details Systems and methods for charging a cleaning solution used... Systems and methods for charging a cleaning solution used...

2004-07-07

2010-02-02

Cleveland, Michael (Department: 1792)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

Reexamination Certificate

active

07655094

ABSTRACT:
Inventive methods, systems and compositions of cleaning integrated circuit (“IC”) substrates are described. The cleaning methods of the present invention include: charging a solution, which contains at least a solute selected to promote cleaning of the IC substrate, to produce a charged solution, such that at least a portion of the solute is present as clusters in the charged solution; and conveying the charged solution for cleaning the IC substrate.

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