Systems and methods for amorphous flexures in micro-electro...

Details Systems and methods for amorphous flexures in micro-electro... Systems and methods for amorphous flexures in micro-electro...

2007-02-27

2007-02-27

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S321000, C438S048000, C438S050000, C438S052000, C438S482000, C257S415000, C257S432000, C257S448000

Reexamination Certificate

active

10958707

ABSTRACT:
A micro-electro mechanical system includes a flexure, wherein the flexure is made of an amorphous material. Similarly, a method for forming a micro-electro mechanical system includes forming a substrate, and forming an amorphous flexure, the amorphous flexure being coupled to the substrate.

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