Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Reexamination Certificate
2006-07-18
2006-07-18
Nguyen, George (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
With feeding of tool or work holder
C451S056000, C451S443000, C451S444000, C451S285000, C451S287000, C451S060000
Reexamination Certificate
active
07077722
ABSTRACT:
Systems and methods for activating end effectors used to condition microfeature workpiece polishing pads are disclosed. A system in accordance with one embodiment of the invention includes a rotatable end effector having a conditioning surface configured to condition a microfeature workpiece polishing medium, and a driver coupled to the end effector to rotate the end effector. The driver does not include a flexible, continuous belt coupled to the end effector. For example, the driver can include a motor-driven worm meshed with a worm gear. The system can further include a forcing element coupled to the end effector to apply a force to the end effector that is at least approximately normal to a conditioning surface of the end effector. The forcing element can include a first generally rigid member and a second generally rigid member coupled to the end effector and movable relative to the first generally rigid member to apply the force.
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Barnhart Gunnar A.
Dringle Charles K.
Mayes Brett A.
Meadows Michael E.
Micro)n Technology, Inc.
Nguyen George
Perkins Coie LLP
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