Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2011-07-26
2011-07-26
Kwok, Helen C. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504040, C073S504140
Reexamination Certificate
active
07984648
ABSTRACT:
A Micro-Electro-Mechanical Systems (MEMS) inertial sensor systems and methods determine linear acceleration and rotation in the in-pane and out-of-plane directions of the MEMS inertial sensor. An out-of-plane linear acceleration of the MEMS sensor may be sensed with the first out-of-plane electrode pair and the second out-of-plane electrode pair. An in-plane rotation of the MEMS sensor may be sensed with the first out-of-plane electrode pair and the second out-of-plane electrode. An in-plane linear acceleration of the MEMS sensor may be sensed with the first in-plane sense comb and the second in-plane sense comb. An out-of-plane rotation of the MEMS sensor may be sensed with the first in-plane sense comb and the second in-plane sense comb.
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Horning Bob D.
Supino Ryan
Fogg & Powers LLC
Honeywell International , Inc.
Kwok Helen C.
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