Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-03-29
2011-03-29
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C359S370000
Reexamination Certificate
active
07916304
ABSTRACT:
In one embodiment, an apparatus comprises an optical system with multiple detectors and a processor. The optical system is configured to produce images of an optical source in a first dimension and a second dimension substantially orthogonal to the first dimension at each detector at a given time. Each image from the images is based on an interference of an emission from the optical source in a first direction and an emission from the optical source in a second direction different from the first direction. The processor is configured to calculate a position in a third dimension based on the images. The third dimension is substantially orthogonal to the first dimension and the second dimension.
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Lyons Michael A
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