Radiant energy – Ionic separation or analysis – Methods
Reexamination Certificate
2011-03-15
2011-03-15
Vanore, David A (Department: 2881)
Radiant energy
Ionic separation or analysis
Methods
C250S281000, C250S288000, C435S006120, C435S007100, C435S007230, C436S052000, C436S063000, C436S064000, C514S013800, C514S014800, C702S019000, C702S022000, C706S016000, C706S048000
Reexamination Certificate
active
07906758
ABSTRACT:
The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review. The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis. The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.
REFERENCES:
patent: 4443319 (1984-04-01), Chait et al.
patent: 4483885 (1984-11-01), Chait et al.
patent: 4977320 (1990-12-01), Chowdhury et al.
patent: 5045694 (1991-09-01), Beavis et al.
patent: 5227471 (1993-07-01), Wright, Jr.
patent: 5245186 (1993-09-01), Chait et al.
patent: 5296114 (1994-03-01), Manz
patent: 5314996 (1994-05-01), Wright, Jr.
patent: 5358618 (1994-10-01), Ewing et al.
patent: 5393975 (1995-02-01), Hail et al.
patent: 5545304 (1996-08-01), Smith et al.
patent: 5599432 (1997-02-01), Manz et al.
patent: 5624539 (1997-04-01), Ewing et al.
patent: 5639656 (1997-06-01), Wright, Jr.
patent: 5652427 (1997-07-01), Whitehouse et al.
patent: 5788166 (1998-08-01), Valaskovic et al.
patent: 5833861 (1998-11-01), Afeyan et al.
patent: 5856671 (1999-01-01), Henion et al.
patent: 5872010 (1999-02-01), Karger et al.
patent: 5917184 (1999-06-01), Carson et al.
patent: 5952653 (1999-09-01), Covey et al.
patent: 5958202 (1999-09-01), Regnier et al.
patent: 5993633 (1999-11-01), Smith et al.
patent: 6017693 (2000-01-01), Yates, III et al.
patent: 6033546 (2000-03-01), Ramsey
patent: 6068749 (2000-05-01), Karger et al.
patent: 6086243 (2000-07-01), Paul et al.
patent: 6091502 (2000-07-01), Weigl et al.
patent: 6107628 (2000-08-01), Smith et al.
patent: 6139734 (2000-10-01), Settlage et al.
patent: 6157921 (2000-12-01), Barnhill
patent: 6159739 (2000-12-01), Weigl et al.
patent: 6175112 (2001-01-01), Karger et al.
patent: 6187190 (2001-02-01), Smith et al.
patent: 6207370 (2001-03-01), Little et al.
patent: 6207954 (2001-03-01), Andrien, Jr.
patent: 6225047 (2001-05-01), Hutchens et al.
patent: 6231737 (2001-05-01), Ramsey et al.
patent: 6240790 (2001-06-01), Swedberg et al.
patent: 6277641 (2001-08-01), Yager et al.
patent: 6280589 (2001-08-01), Manz et al.
patent: 6284113 (2001-09-01), Bjornson et al.
patent: 6284115 (2001-09-01), Apffel
patent: 6306087 (2001-10-01), Barnhill et al.
patent: 6309816 (2001-10-01), Zhang et al.
patent: 6318970 (2001-11-01), Backhouse
patent: 6322682 (2001-11-01), Arvidsson et al.
patent: 6329209 (2001-12-01), Wagner et al.
patent: 6342142 (2002-01-01), Ramsey
patent: 6358692 (2002-03-01), Jindal et al.
patent: 6363383 (2002-03-01), Kindo et al.
patent: 6368562 (2002-04-01), Yao
patent: 6375817 (2002-04-01), Taylor et al.
patent: 6379971 (2002-04-01), Schneider et al.
patent: 6427141 (2002-07-01), Barnhill
patent: 6558955 (2003-05-01), Kristal et al.
patent: 6593298 (2003-07-01), Jackowski et al.
patent: 6599877 (2003-07-01), Jackowski et al.
patent: 6602855 (2003-08-01), Jackowski et al.
patent: 6617308 (2003-09-01), Jackowski et al.
patent: 6620786 (2003-09-01), Jackowski et al.
patent: 6620787 (2003-09-01), Jackowski et al.
patent: 6627606 (2003-09-01), Jackowski et al.
patent: 6627607 (2003-09-01), Jackowski et al.
patent: 6627608 (2003-09-01), Jackowski et al.
patent: 6658395 (2003-12-01), Barnhill
patent: 6675104 (2004-01-01), Paulse et al.
patent: 6677303 (2004-01-01), Jackowski et al.
patent: 6703366 (2004-03-01), Jackowski et al.
patent: 6714925 (2004-03-01), Barnhill et al.
patent: 6756476 (2004-06-01), Jackowski et al.
patent: 6863790 (2005-03-01), Moini et al.
patent: 7007710 (2006-03-01), Heller et al.
patent: 7105812 (2006-09-01), Zhao et al.
patent: 7425700 (2008-09-01), Stults et al.
patent: 7460960 (2008-12-01), Lee et al.
patent: 2001/0014461 (2001-08-01), Hutchens et al.
patent: 2001/0041357 (2001-11-01), Fouillet et al.
patent: 2002/0036140 (2002-03-01), Manz et al.
patent: 2002/0039747 (2002-04-01), Lubman et al.
patent: 2002/0041827 (2002-04-01), Yager et al.
patent: 2002/0048777 (2002-04-01), Ali et al.
patent: 2002/0054289 (2002-05-01), Thibault et al.
patent: 2002/0095260 (2002-07-01), Huyn
patent: 2002/0119490 (2002-08-01), Aebersold et al.
patent: 2002/0127237 (2002-09-01), Salceda et al.
patent: 2002/0138208 (2002-09-01), Paulse et al.
patent: 2002/0142481 (2002-10-01), Andersson et al.
patent: 2002/0177140 (2002-11-01), Salceda et al.
patent: 2002/0193950 (2002-12-01), Gavin et al.
patent: 2003/0004402 (2003-01-01), Hitt et al.
patent: 2003/0013120 (2003-01-01), Patz, Jr. et al.
patent: 2003/0032043 (2003-02-01), Pohl et al.
patent: 2003/0039983 (2003-02-01), Sun et al.
patent: 2003/0064377 (2003-04-01), Sun et al.
patent: 2003/0077611 (2003-04-01), Slepnev
patent: 2003/0078739 (2003-04-01), Norton et al.
patent: 2003/0089605 (2003-05-01), Timperman
patent: 2003/0111596 (2003-06-01), Becker et al.
patent: 2003/0129760 (2003-07-01), Aguilera et al.
patent: 2003/0132114 (2003-07-01), Mischak et al.
patent: 2003/0134304 (2003-07-01), van der Greef et al.
patent: 2003/0148295 (2003-08-01), Wan et al.
patent: 2003/0148922 (2003-08-01), Knapp et al.
patent: 2003/0153007 (2003-08-01), Chen et al.
patent: 2003/0175707 (2003-09-01), Sun et al.
patent: 2003/0194739 (2003-10-01), Ali et al.
patent: 2003/0199001 (2003-10-01), Pitt et al.
patent: 2003/0224531 (2003-12-01), Brennen et al.
patent: 2003/0228639 (2003-12-01), Wright et al.
patent: 2004/0005634 (2004-01-01), Patz, Jr. et al.
patent: 2004/0018519 (2004-01-01), Wright , Jr.
patent: 2004/0029194 (2004-02-01), Parish et al.
patent: 2004/0033591 (2004-02-01), Lubman et al.
patent: 2004/0043436 (2004-03-01), Vlahou et al.
patent: 2004/0053333 (2004-03-01), Hitt et al.
patent: 2004/0075050 (2004-04-01), Rossier et al.
patent: 2004/0153249 (2004-08-01), Zhang et al.
patent: 2004/0180380 (2004-09-01), Lee et al.
patent: 2004/0235052 (2004-11-01), Heller et al.
patent: 2004/0236603 (2004-11-01), Heller et al.
patent: 2005/0059013 (2005-03-01), Chan et al.
patent: 2005/0072915 (2005-04-01), Stults et al.
patent: 2005/0244973 (2005-11-01), Andel, III et al.
patent: 2006/0027744 (2006-02-01), Stults et al.
patent: 2006/0186048 (2006-08-01), Tan
patent: 2007/0009970 (2007-01-01), Heller et al.
patent: 0881494 (1998-12-01), None
patent: 1512970 (2005-03-01), None
patent: WO 95/25281 (1995-09-01), None
patent: WO 00/23111 (2000-04-01), None
patent: WO 00/63683 (2000-10-01), None
patent: WO 00/65472 (2000-11-01), None
patent: WO 01/25791 (2001-04-01), None
patent: WO 01/36977 (2001-05-01), None
patent: WO 01/57263 (2001-08-01), None
patent: WO 01/57518 (2001-08-01), None
patent: WO 01/71360 (2001-09-01), None
patent: WO 02/04957 (2002-01-01), None
patent: WO 02/06829 (2002-01-01), None
patent: WO 02/08760 (2002-01-01), None
patent: WO 02/27329 (2002-04-01), None
patent: WO 02/46448 (2002-06-01), None
patent: WO 02/007703 (2002-12-01), None
patent: WO 03/014302 (2003-02-01), None
patent: WO 03/031031 (2003-04-01), None
patent: WO 03/038055 (2003-05-01), None
patent: WO 03/042774 (2003-05-01), None
patent: WO 03/057014 (2003-07-01), None
patent: WO 03/058198 (2003-07-01), None
patent: WO 03/072710 (2003-09-01), None
patent: WO 03/083442 (2003-10-01), None
patent: WO 03/086445 (2003-10-01), None
patent: WO 03/089937 (2003-10-01), None
patent: WO 03/091695 (2003-11-01), None
patent: WO 03/097799 (2003-11-01), None
patent: WO 2004/012588 (2004-02-01), None
patent: WO 2004/013609 (2004-02-01), None
patent: WO 2004/030511 (2004-04-01), None
patent: WO 2004/055519 (2004-07-01), None
patent: WO 2004/061407 (2004-07-01), None
patent: WO 2004/061410 (20
Greenquist Alfred
Sassi Alexander
Stults John T.
Norviel Vern
Vanore David A
Wilson Sonsini Goodrich & Rosati
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