System to control an atmosphere between a body and a substrate

Details System to control an atmosphere between a body and a substrate System to control an atmosphere between a body and a substrate

2008-01-08

2008-01-08

Gupta, Yogendra N. (Department: 1722)

Plastic article or earthenware shaping or treating: apparatus

With means cleaning and purifying atmosphere surrounding...

C425S385000, C425S406000, C264S293000, C264S085000

Reexamination Certificate

active

07316554

ABSTRACT:
The present invention is directed towards a system to control an atmosphere about a substrate, the system including, inter alia, a body spaced-apart from a surface of the substrate a distance; a supply of fluid coupled to introduce a flow between the body and the substrate; and a wall coupled to the body to create a resistance of the flow between first and second regions of the substrate, with a position of the wall being varied in response to a decrease in a magnitude of the distance.

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