System that includes an electrode configuration in a MEMS...

Details System that includes an electrode configuration in a MEMS... System that includes an electrode configuration in a MEMS...

2005-12-06

2005-12-06

Enad, Elvin G. (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

06972650

ABSTRACT:
A microelectromechanical system (MEMS) switch that includes a signal contact, an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode. The signal contact includes a first portion and a second portion. The actuation electrode is positioned between the first and second portions of the signal contact.

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Muldavin, Jeremy B., et al., “Inline Capacitive and DC-Contact MEMS Shunt Switches”,Submitted to the IEEE Microwave and Wireless Components Letter,(Feb. 15, 2001), 1-3.

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