System of testing semiconductor devices, a method for...

Details System of testing semiconductor devices, a method for... System of testing semiconductor devices, a method for...

2006-03-14

2009-12-08

Mackey, Patrick H (Department: 3653)

Classifying, separating, and assorting solids

Sorting special items, and certain methods and apparatus for...

Condition responsive means controls separating means

C209S571000, C209S572000

Reexamination Certificate

active

07629550

ABSTRACT:
A system of testing semiconductor devices includes a classification module configured to classify a plurality of lots into a plurality of groups; an apparatus assignment module configured to assign a plurality of testing apparatuses to each of the groups; and a test recipe creation module configured to create a test recipe to test defects in a second group other than a first group specified in the groups, the test recipe including a definition of testing positions in the second group defined by a rule different from the first group.

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M. Asano, et al., “Sampling Plan Optimization for CD Control in Low k1Lithography”, Metrology, Inspection, and Process Control for Microlithography XIX, Proc. of SPIE vol. 5752, pp. 727-735, May 2005.

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