Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2006-10-31
2006-10-31
Tran, Khoi H. (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C700S213000, C700S069000, C700S262000
Reexamination Certificate
active
07130716
ABSTRACT:
A system for wafer handling employing a complex numerical method for calculating a path of wafer travel that controls wafer acceleration and jerk, and results in maximum safe speed of wafer movement from a first point to a second point. Motion is begun along a straight line segment while accelerating to a first path velocity. During this acceleration, the system computer calculates a series of straight line segments and interconnecting sinusiodally shaped paths over which the wafer is to be guided to the second point. The straight line segments and sinusiodally shaped paths are calculated so as to minimize total path length and the time required to move the wafer from the first point to the second point. The system computes the point of entrance and exit to and from each straight and sinusoidal path.
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Padmanabhan Prasad
Rogers John
Sagues Paul
Berkeley Process Control, Inc.
Jaffer David H.
Pillsbury Winthrop Shaw & Pittman LLP
Tran Khoi H.
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