System of manufacturing magnetic recording media

Details System of manufacturing magnetic recording media System of manufacturing magnetic recording media

1983-01-18

1985-04-16

Morgenstern, Norman

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

118 501, 118723, 118726, 118729, 204192N, 427 39, 427 42, 427132, 427250, 427251, 427294, C23C 1308

Patent

active

045115940

ABSTRACT:
A system of manufacturing a magnetic recording medium in which a magnetic metal or alloy is heated and evaporated by an electron beam gun so that vacuum-evaporated magnetic film is formed on a non-organic or organic macromolecular base. A plasma generating coil is disposed near an evaporating source and an electron beam passes through the hollow portion of the coil in preferably a direction coaxial with the axis of the coil. High frequency power is applied to the coil and vacuum deposition is carried out with a plasma generated thereby. The flow of vapor of magnetic metal or alloy is applied obliquely to the base and an oxidation gas is introduced into a vacuum container for forming the magnetic film.

REFERENCES:
patent: 3908183 (1975-09-01), Ennis
patent: 3929604 (1975-12-01), Shirahata
patent: 4098919 (1978-07-01), Morimoto et al.
patent: 4354909 (1982-10-01), Takagi et al.
patent: 4400444 (1983-08-01), Izumi et al.

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