System of doors between two mobile containers, particularly two

Details System of doors between two mobile containers, particularly two System of doors between two mobile containers, particularly two

1993-04-30

1994-01-04

Brown, Peter R.

Supports: cabinet structure

Barrier opening with flexible seal for operator

312296, A47B 9600

Patent

active

052754790

ABSTRACT:
The invention permits the transfer between two containers of an object without the latter being in contact with the atmosphere around the containers. The system comprises two doors (12, 22) joined tightly to one another in such a way that the outer faces (13, 23) of these doors are positioned facing one another during opening, e.g. by winding the same around a drum (21). These doors are constituted by two flexible curtains sliding in lateral carriages. The system is particularly applicable to the production of semiconductor wafers or slices in an ultraclean atmosphere.

REFERENCES:
patent: 3491720 (1970-01-01), Harris
patent: 3907389 (1975-09-01), Cox et al.
patent: 4604111 (1986-08-01), Natale
patent: 4746256 (1988-05-01), Boyle et al.

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