Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-08-02
2005-08-02
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C430S022000, C430S030000
Reexamination Certificate
active
06924879
ABSTRACT:
A system for instructing allocation of a plurality of exposure units, having a selector configured to select a first exposure unit to be employed in a process of forming a first exposure pattern on an objective substrate among the exposure units, a mix-and-match unit configured to compute overlay correction values for canceling differences in stage and lens characteristics between the first exposure unit and a second exposure unit that is employed in a process of forming a second exposure pattern on the objective substrate, an allocation commander configured to instruct to allocate the first exposure unit for the objective substrate prior to another substrate scheduled for the first exposure unit, and a storage unit configured to store data concerning the stage and lens characteristics.
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patent: 2002/0111038 (2002-08-01), Matsumoto et al.
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