System, method, and computer product for detection...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Position measurement

Reexamination Certificate

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C356S622000

Reexamination Certificate

active

11231266

ABSTRACT:
In one embodiment, a method of determining a drift value is described that includes performing one or more X-axis translations of an excitation beam over a probe array; measuring light responsive to the excitation beam from at least two positional reference elements associated with the probe array for the X-axis translations; calculating a distance value for the X-axis translation using a positional relationship of a known location associated with each of the positional reference elements and positions of the positional reference elements from the measured light; and determining a drift value using a difference between the calculated distance value and an expected distance value.

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