System, method, and apparatus for non-contact and diffuse...

Details System, method, and apparatus for non-contact and diffuse... System, method, and apparatus for non-contact and diffuse...

2008-05-27

2008-05-27

Davis, Robert B. (Department: 1791)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

Surface deformation means only

C425S174400, C425S388000, C264S259000, C264S319000, C264S496000

Reexamination Certificate

active

07377765

ABSTRACT:
A nanoimprinting configuration includes a UV light diffuser that randomizes a collimated UV light beam so as to diffuse the shadowing effect from any defect object that resides in the UV optical path. In addition, a combination center circular pad and outer ring-shaped pad form a donut-shaped “non-contact” area between the two pad pieces. The size and shape of the two pad combination are designed to avoid direct gel pad contact above the patterned imprint zone on the disk substrate. The purpose of the gel pad, non-contact configuration is to eliminate any possible surface deformation incurred along the loading column and thereby avoid the elastic propagation of any deformations to the stamper resist surface.

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