System, method and apparatus for multi-beam lithography...

Details System, method and apparatus for multi-beam lithography... System, method and apparatus for multi-beam lithography...

2007-05-08

2007-05-08

Patel, Nimeshkumar D. (Department: 2879)

Electric lamp and discharge devices

Electrode and shield structures

Cathodes containing and/or coated with electron emissive...

C313S345000, C313S270000, C313S337000, C313S34600R

Reexamination Certificate

active

10778787

ABSTRACT:
A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

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