System having reduced distance between scintillator and...

Details System having reduced distance between scintillator and... System having reduced distance between scintillator and...

2008-06-04

2010-02-09

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

Reexamination Certificate

active

07659519

ABSTRACT:
A sensor includes a carrier carrying a light sensor array. The light sensor array has pixels that are each configured to generate an electrical output in response to receiving a light photon. The light sensor array can be included in or on a wafer or can be built in or on a wafer. The sensor also includes electrical conductors through which the pixels electrically communicate with electronics on the carrier. Each of the electrical conductors is at least partially positioned in a recess that extends into the wafer.

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Hirafune, Sayaka et al.,Packaging Technology for Imager Using Through-hole Interconnections in Si Substrate; Proceedings of HDP'04, 2004 IEEE; p. 303-306.

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