Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1998-11-04
2000-03-07
Font, Frank G.
Optics: measuring and testing
By particle light scattering
With photocell detection
356346, G01B 902
Patent
active
060347716
ABSTRACT:
A system for regulating heating temperature of a material is provided. The material may be a photoresist, a top or bottom anti-reflective coating, a low K dielectric material, SOG or other spin-on material, for example. The system includes a plurality of optical fibers, each optical fiber directing radiation to respective portions of the material. Radiation reflected from the respective portions are collected by a measuring system which processes the collected radiation. The reflected radiation are indicative of the temperature of the respective portions of the material. The measuring system provides material temperature related data to a processor which determines the temperature of the respective portions of the material. The system also includes a plurality of heating devices; each heating device corresponds to a respective portion of the material and provides for the heating thereof. The processor selectively controls the heating devices so as to regulate temperature of the respective portions of the material.
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patent: 4518848 (1985-05-01), Weber
patent: 4859572 (1989-08-01), Farid et al.
patent: 5167078 (1992-12-01), Bolde et al.
patent: 5716763 (1998-02-01), Benoit et al.
patent: 5825043 (1998-10-01), Suwa
Rangarajan Bharath
Singh Bhanwar
Templeton Michael K.
Yedur Sanjay K.
Advanced Micro Devices , Inc.
Font Frank G.
Punnoose Roy M.
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