System for ultrasonic lap grinding and polishing

Details System for ultrasonic lap grinding and polishing System for ultrasonic lap grinding and polishing

1994-03-14

1996-09-03

Kisliuk, Bruce M.

Abrading

Abrading process

Glass or stone abrading

451165, 451278, 451287, B24B 100

Patent

active

055519075

ABSTRACT:
A method is disclosed for grinding and polishing a substrate (20). An abrasive slurry (26) is applied to the surface (22) of the substrate (20). A lap (28) is moved across, and in engagement with, the surface of the substrate (20) in the medium of the abrasive slurry (26). Ultrasonic energy is mechanically applied to the surface (24) of the substrate such that half wave resonance occurs substantially at the surface (22) of the substrate (20). In this manner, a thickness of material is removed at an enhanced rate from the surface (22) of the substrate (20).

REFERENCES:
patent: 5099614 (1992-03-01), Arai et al.
patent: 5245790 (1993-09-01), Jerbic
patent: 5245796 (1993-09-01), Miller et al.

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