System for trimming microelectronic resistors

Electric heating – Metal heating – Cutting or disintegrating

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437172, H05B 600, H01L 21326, H01L 21479

Patent

active

047059311

ABSTRACT:
A system for trimming the ohmic value of a resistor included in a microelectronic chip to raise or lower its resistance without changing its physical dimensions. The system is provided with a self-contained unit which generates a low radio-frequency carrier overmodulated by a sonic frequency signal to yield at its output terminal pulsed radio-frequency energy. Coupled by an extension cable to the output terminal of the unit is a portable probe assembly whose position may be manipulated to bring the assembly into operative relation with the resistor to be trimmed. The assembly includes a tank circuit connected by the cable to the output terminal of the unit and tuned to the carrier frequency so that the pulsed energy is stored therein and not radiated. A "Down" probe is inductively coupled in step-up relation to the tank circuit to cause a corona discharge beam to be projected from the tip of this probe, which beam when directed toward a point on the resistor acts to reduce its ohmic value. An "Up" probe is inductively coupled in step-down relation to the tank circuit so that when this probe is brought into contact with a point on the resistor, the resultant current acts to increase its ohmic value.

REFERENCES:
patent: 2737802 (1941-04-01), Wittke
patent: 2882463 (1959-04-01), Dickinson
patent: 3119919 (1964-01-01), Pratt
patent: 3585338 (1971-06-01), Rosenthal
patent: 3676633 (1972-06-01), Di Mino
patent: 3930304 (1976-01-01), Keller et al.
patent: 4458129 (1984-07-01), Zasio et al.

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