Radiant energy – With charged particle beam deflection or focussing – With detector
Patent
1994-08-01
1995-11-21
Berman, Jack I.
Radiant energy
With charged particle beam deflection or focussing
With detector
324 713, G01R 1300
Patent
active
054689660
ABSTRACT:
A tomographic technique for measuring the current density distribution in electron beams using electron beam profile data acquired from a modified Faraday cup to create an image of the current density in high and low power beams. The modified Faraday cup includes a narrow slit and is rotated by a stepper motor and can be moved in the x, y and z directions. The beam is swept across the slit perpendicular thereto and controlled by deflection coils, and the slit rotated such that waveforms are taken every few degrees form 0.degree. to 360.degree. and the waveforms are recorded by a digitizing storage oscilloscope. Two-dimensional and three-dimensional images of the current density distribution in the beam can be reconstructed by computer tomography from this information, providing quantitative information about the beam focus and alignment.
REFERENCES:
patent: 5319212 (1994-06-01), Tokoro
patent: 5382895 (1995-01-01), Elmer et al.
Elmer John W.
O'Brien Dennis W.
Teruya Alan T.
Berman Jack I.
Beyer James
Carnahan L. E.
Regents of the University of California
Sartorio Henry P.
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