Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1997-12-01
2000-09-26
Moller, Richard A.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351433, 7351432, G01P 1500
Patent
active
061229652
ABSTRACT:
A system for measuring acceleration in three axes comprises four individual sensors arranged in a rectangle on a common substrate with each having one main sensitivity axis. Each individual sensor has a seismic mass in the form of a cantilevered paddle connected by a bending beam to an outer frame and having a center of gravity. Each beam is arranged parallel to the substrate surface and each contains means for measuring the bending that occurs when acceleration forces act upon the system. The actual acceleration occurring on each axis can then be determined as a function of the error angle formed between the sensitivity axis and the normal to the substrate surface.
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patent: 5614673 (1997-03-01), Yamamoto
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patent: 5777227 (1998-07-01), Cho et al.
Prechtel Ulrich
Schalk Josef
Seidel Helmut
Daimler-Chrysler AG
Kunitz Norman N.
Moller Richard A.
Spencer George
TEMIC Telefunken microelectronic GmbH
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