System for the measurement of acceleration in three axes

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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7351433, 7351432, G01P 1500

Patent

active

061229652

ABSTRACT:
A system for measuring acceleration in three axes comprises four individual sensors arranged in a rectangle on a common substrate with each having one main sensitivity axis. Each individual sensor has a seismic mass in the form of a cantilevered paddle connected by a bending beam to an outer frame and having a center of gravity. Each beam is arranged parallel to the substrate surface and each contains means for measuring the bending that occurs when acceleration forces act upon the system. The actual acceleration occurring on each axis can then be determined as a function of the error angle formed between the sensitivity axis and the normal to the substrate surface.

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patent: 5412987 (1995-05-01), Bergstrom et al.
patent: 5614673 (1997-03-01), Yamamoto
patent: 5723790 (1998-03-01), Andersson
patent: 5777227 (1998-07-01), Cho et al.

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