System for supporting data analysis in VLSI process

Details System for supporting data analysis in VLSI process System for supporting data analysis in VLSI process

1993-12-09

1998-06-16

Teska, Kevin J.

Boots, shoes, and leggings

364468, 364489, 364490, G06F 1750

Patent

active

057681449

ABSTRACT:
A system for supporting data analysis in a VLSI producing process is arranged to flexibly correspond to any data analysis requested by a system user. The system basically includes a registering unit for registering data in a database, an extracting unit for extracting necessary data from the registering unit, a processing unit for processing the extracted data, and a data statistical processing unit for producing statics from the extracted or processed data. In the registering unit, the data is stored as a collected data relation group for storing data and a common index information relation group for an index and a history of a processed wafer. Both of the relation groups are coupled through an index information key consisting of a process ID, a producing step ID, a lot ID and a wafer ID provided in both of the relation groups. In the extracting unit, two independent modules are provided so as to communicate one with another. In the working or statistical processing unit, the items to be selected are displayed on the screen in a hierarchical manner.

REFERENCES:
patent: 5150308 (1992-09-01), Hooper et al.
patent: 5272641 (1993-12-01), Ford et al.
patent: 5311424 (1994-05-01), Mukherjee et al.
patent: 5321605 (1994-06-01), Chapman et al.
patent: 5339247 (1994-08-01), Kirihara et al.
patent: 5355320 (1994-10-01), Erjavic et al.
patent: 5375062 (1994-12-01), Aoki
patent: 5392220 (1995-02-01), Van Den Hamer et al.
patent: 5455948 (1995-10-01), Poole et al.
patent: 5465351 (1995-11-01), Lemmo
patent: 5504921 (1996-04-01), Dev et al.
Taylor, "An Analysis of ATE Computational Architecture," 1990 Int'l Test Conf., paper 25.1, pp. 514-519.
K. Kotani and S. Kawazu, "Data Collecting and Processing Method for Semiconductor Process", Journal of Institute of Electrical Engineers of Japan, pp. 219-222; 1986.

Affiliated with

Also associated with

Rating

System for supporting data analysis in VLSI process does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System for supporting data analysis in VLSI process, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System for supporting data analysis in VLSI process will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1733593