System for supplying semiconductor manufacturing system...

Details System for supplying semiconductor manufacturing system... System for supplying semiconductor manufacturing system...

2002-01-18

2008-12-30

Chavis, John (Department: 2193)

Data processing: software development, installation, and managem

Software installation

Reexamination Certificate

active

07472387

ABSTRACT:
A system for supplying a semiconductor manufacturing system control program includes an administrative server, a communications circuit connecting the administrative server to a controller of a semiconductor manufacturing system, a facility provided in the controller for determining a time when a previously installed control program can be changed, and a facility provided in the controller responsive to a result of the determination for storing a new control program received from the administrative server through the communications circuit in a memory to be executable by a processor.

REFERENCES:
patent: 5970243 (1999-10-01), Klein et al.
patent: 2001/0029178 (2001-10-01), Criss et al.
patent: 2003/0217257 (2003-11-01), Ebsen et al.
patent: 10-301799 (1998-11-01), None
patent: 11-95811 (1999-04-01), None
patent: 1998-025897 (1998-07-01), None
patent: 1999-0038795 (1999-06-01), None
Korean Office Action issued Mar. 31, 2008 in Korean Application No. 9-5-2008-018279999.

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